The VG Scienta OFT EDGE Series incorporates highly configurable systems for depositing and analysing organic and inorganic layers on flexible and solid substrates and device fabrication. The system is designed in such a way to provide a configurable tool that allows the customer to choose both the order and the content of the device to be constructed. The modules within the tool can be used as either stand alone units when combined with a fast entry load lock or can be fully integrated into the multi-purpose cluster tool in conjunction with a central handler.
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