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Technical Data:ZMRD6
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Leak Rate
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<1x10-10 mbar l.s-1
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Pressure Range
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1x10-10 mbar – 2 bar absolute
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Temperature Range
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250 oC standard UHV drives (with motor/gearbox removed)
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200 oC Extended UHV drives (with motor/gearbox removed)
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Materials
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Body – 316 stainless steel
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Mechanical parts – aluminium alloy – grade 6082
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Bearings – stainless steel
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Magnets – sintered rare-earth
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Lubrication
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Dry film molybdenum disulphide (standard UHV drives)
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UHV compatible lubricant (extended life drives)
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Actuation
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Manual, Stepper Motor, Encoder, DC Motor
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Options
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Ceramic bearing options, special shaft length/diameters, available on request.
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