UHV Cluster tools

Introduction to R2P2 Cluster Tools

The R2P2 cluster tool is a development of the linear rack and pinion transporter, where a single ended rack and pinion can be rotated within a circular vessel until it is aligned in a preset position at a radial port on the housing chamber by a rotary drive.

Once locked in position, the same rotary drive moves the rack out through the port. R2P2s are normally mounted at the centre of a series of chambers and form a central hub from which all of the transfer takes place; they can be also used to join one or more systems together. The R2P2 chamber is normally connected by isolation valves to each of the connecting chambers allowing it to be sealed off as required. Careful design can allow storage carousels to be placed inside the chamber to allow sample storage as well as transfer to and from vessels.

A port mounted at the base of the R2P2 allows a pump to maintain the chamber at a pressure lower than 10-10 mbar if required. The XLTL series of linear transfer devices are rack and pinion drives based on the RLRP transfer arm. This has an NW35CF (70 mm OD) mounting flange and is available in a range of travels from 305 mm to 914 mm. The secondary motion of the RLRP is used to disengage the carrier from the transfer arm.

The basic transfer arm, the XLTLB, can be supplied with an extension sleeve to bring the secondary movement close to the mounting port. This is recommended for long travels. A spring release extension sleeve with limit stops can be supplied for additional security.

The XLTR radial transfer mechanism is based on the innovative R2P3 device. This is positioned as the hub of the system chambers which are located around the XLTR. Samples can then be distributed radially from the entry lock into the process, preparation and analysis chambers and so on. This has the advantage that a single device can be used for all sample transfer requirements.

The XLRD series of linear transfer devices are magnetically coupled and based on our MLRD range of drives. This is a lower cost option than the XLTL version but does not offer the same sample security as the XLTL and XLTLSS combination.